MOCVD Planetary Reactor G1 15” x 2” and 8” x 3”

This reactor was built for US company “Bandgap”, and then used by SST, who was put it on CAE for sale.

Configuration:

	1	2	3	4	5	6	7	8
Hyd	As1	As2	Ph1	Si2H6	HCl	Spare
MO	Ga1	Ga2	In1	In2	Al1	Al2	Mg	Zn

Temperature range: Up to 850°C
Recently used for AlInGaP LEDs
Gases used: Arsine, Phosphine, DiSi2H6, HCL
Windows based operating system: Upgraded from OS9

Inquiries for growth of 2” wafers on GaSb, GaAs, and InP could be sent to kk{sign}photin.eu.

!!We send Thanks to dr Chen who was the last Epi expert who worked on this machine!!